Microvibration Measurement in High-tech Factories
Micro-vibration Measurement in High-tech Factories is crucial because of the sensitive nature of the work that occurs there. High-tech factories are equipped with various exposure machines, etching machines, and other precision machines, which are particularly sensitive to environmental vibration. So, it is necessary to measure and evaluate the micro-vibration of the floor.
This measurement is generally carried out using a high-sensitivity accelerometer to measure the 1/3 octave spectrum of the vibration speed, and the vibration value is classified into seven levels from VC-A to VC-G according to the Generic Vibration Criteria.
Our portable spectrometer — impaq Elite — has built the VC standard into the 1/3 octave spectrum measurement module, and with the use of the high-sensitivity accelerometer WR 731A, the micro-vibration level of the floor can be read immediately during real-time measurement in the field, and the report can be printed quickly from the PC program.